| 摘要 |
PROBLEM TO BE SOLVED: To enhance work efficiency of recovery and enhance safety of recovery by arranging the constitution, such that it can automatically recover the remaining material from the state of occurrence of abnormality of the device. SOLUTION: A semiconductor manufacturing apparatus, which has a plurality processing stages is constituted such that it possesses a storage 22, which stores a path information preservation area 26 for recording the information about individual paths to be processed and a material recovery program 25, it obtains information about the existence and the position of material from a path information preservation area, it drives a mechanism part according to a material recovery program, and it expels the remaining material to a required place, in the case that the device has stopped in an emergency. |
