| 摘要 |
Microwave routing elements and methods of directing microwaves are disclosed. One routing element comprises an inlet region, a plurality of outlet regions, and junctures positioned between an associated outlet region and the inlet region. Each juncture includes electrodes configured for generating an electrical arc across the juncture to inhibit transmission of microwave energy when the arc is present and permit passage of the microwave energy when the arc is absent. Another routing element includes the inlet region, the outlet regions, and partitions positioned between an associated outlet region and the inlet region. Each partition includes apertures and each aperture includes electrodes configured for generating an electrical arc across the aperture to inhibit transmission of microwave energy when the arc is present and permit passage of microwave energy when the arc is absent. Systems including the routing element, a microwave source, and a plurality of microwave processing chambers are also disclosed.
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