Micro-switching device and method of manufacturing micro-switching device

摘要

A micro-switching device includes a base substrate and a cantilever fixed to the base substrate via a spacer or anchor portion. The cantilever has an inner surface facing the substrate and an outer surface opposite to the inner surface. A conductive strip is formed on the outer surface of the cantilever. The switching device also includes a pair of stationary electrodes fixed to the base substrate. Each of the electrodes includes a downward contacting part spaced from the conductive strip on the cantilever. As the cantilever bends upward, the conductive strip is brought into contact with the contacting parts of the respective stationary electrodes.