| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide drawing equipment for improving the drawing position accuracy, while realizing shortening of drawing time, and to provide a drawing method. <P>SOLUTION: The drawing equipment 1 is provided with a correction processing part 500 comprising an exposure position storage part 501, an exposure position computing part 502, a clock signal generating part 503, a frequency dividing part 504, a laser length measuring interface (I/F) 505, a position sampling part 506, a moving amount acquisition part 507, a position comparison part 508, a position-holding register 509, a position difference computing part 510, an arrival time computing part 511, a delay pulse number computing part 512, an immediately-prior-to-exposure signal generating part 513, a counter 514 and an exposure signal generating part 515. The correction processing part 500 computes the time required for a substrate to reach a desired exposure position from the measurement position of the substrate 90 length-measured by a laser length measuring device 70 and controls a light irradiation part 30 so as to irradiate a light with a delay delayed by the corresponding time portion. <P>COPYRIGHT: (C)2009,JPO&INPIT |
