| 摘要 |
PROBLEM TO BE SOLVED: To enable a determination of a measuring error generated by a space rotation in a measuring table and/or an inclination of a measuring objective lens, between a position decision of a structure on a substrate; to provide a means capable of correction of a measured value corresponding to the inclination or the rotation and to provide a method of determining the rotation and/or the inclination of the measuring objective lens of the measuring table position; and to provide a correction method of the measuring value of the position of the structure on the substrate correspondingly based on the determined inclination and/or the rotation. SOLUTION: The means and method which determine the space position of at least one of the transfer elements 9, 20 in the coordinate measuring device 1 are disclosed. At least one laser interferometer 24 is directed its measuring beam 23 into the transfer elements 9, 20. At least one laser interferometer directs further the measuring beam into the transfer element so as to determine the rotation of the transfer elements 9, 20 around X coordinate direction or Y coordinate direction or Z coordinate direction. COPYRIGHT: (C)2009,JPO&INPIT
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