| 摘要 |
PROBLEM TO BE SOLVED: To devise a surface flaw inspection device so as to keep the detection precision of the whole of the inspection surface of an object to be inspected constant, to detect a gentle gradient flaw, not to complicate the processing of measured light receiving data, and to miniaturize the inspection device. SOLUTION: The surface flaw inspection device is constituted so as to inspect the gentle gradient flaw on the surface of the object to be inspected at a high speed and equipped with an irradiation light generating means (11), a means (12) for changing the advance direction of the irradiation light generated from the irradiation light generating means, a means (13) for making the incident angle of the irradiation light on the object (14) to be inspected constant, a means (17a) for making the scanning speed of the irradiation light on the object (14) to be inspected constant, a means (15) for altering the advance direction of the reflected light from the surface of the object (14) to be inspected so as to condense the reflected light to one point, a light receiving position measuring means (16) for measuring the incident position of the reflected light, and a means (17b) for processing the measured receiving light position data to judge a flaw part. COPYRIGHT: (C)2009,JPO&INPIT
|
