| 发明名称 |
METHOD AND APPARATUS FOR RANDOMIZING DISPATCH ORDER FOR SINGLE WAFER PROCESSING |
| 摘要 |
A method for dispatching wafers for processing in a tool includes identifying a queue of wafers available to be processed in the tool. One of the wafers is randomly selected based at least in part on a length of time each wafer has been in the queue. The selected wafer is dispatched for processing in the tool.
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| 申请公布号 |
US2009088882(A1) |
申请公布日期 |
2009.04.02 |
| 申请号 |
US20070866060 |
申请日期 |
2007.10.02 |
| 申请人 |
GOFF GERALD L;MARSHALL LESLIE;LIKES DONALD C |
发明人 |
GOFF GERALD L.;MARSHALL LESLIE;LIKES DONALD C. |
| 分类号 |
G06F19/00 |
主分类号 |
G06F19/00 |
| 代理机构 |
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代理人 |
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