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发明名称
GETTER PUMP AND VACUUM COATING INSTALLATION COMPRISING A GETTER PUMP
摘要
申请公布号
EP2041434(A2)
申请公布日期
2009.04.01
申请号
EP20070787069
申请日期
2007.07.04
申请人
VON ARDENNE ANLAGENTECHNIK GMBH
发明人
MILDE, FALK;HECHT, HANS-CHRISTIAN;BRUECKNER, JOERN
分类号
F04B37/02;F04B37/08;H01J7/18
主分类号
F04B37/02
代理机构
代理人
主权项
地址
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