METHOD OF PRODUCTION OF TRICHLOROSILANE BY PLASMA CHEMICAL HYDROGENATION OF SILICON TETRACHLORIDE AND DEVICE TO THIS END

摘要

FIELD: chemistry. ^ SUBSTANCE: atmospheric hydrogen plasma is produced in plasma generator 1. Mix of hydrogen and silicon tetrachloride is fed tangentially, through 3 to 8 torus-like pipeline inlets into mixing chamber 5. Transport hydrogen and plasma hydrogen-to-silicon tetrachloride molar ratio is kept up equal to (1.5/2.0):1. The mix of hydrogen, trichlorosilane and hydrogen chloride produced in hydrogen reduction reactor 2 is fed into condensation unit 22. ^ EFFECT: improved method of producing trichlorosilane. ^ 2 cl, 2 dwg