SUBSTRATE TRANSFER SYSTEM

摘要

Provided is a substrate transfer system for transferring substrates between a substrate storing cassette and a processing apparatus. The substrate transfer system is provided with a first conveyer which transfers a plurality of substrates at the same time; a second conveyer which is continuously arranged from the first conveyer and separately transfers the substrates in the transfer direction; a moving unit, which has a placing section for placing the substrate which is on the second conveyer, and moves the substrate in a direction orthogonally intersecting with the transfer direction on the second conveyer; and a lifting unit which relatively brings up and down the placing section and the second conveyer.