PLASMA HEAD AND PLASMA-DISCHARGING DEVICE USING THE SAME

摘要

A plasma head and the plasma-discharging device using the same are disclosed. The plasma-discharging device comprises a power supply with two electrode terminals. The plasma head comprises: an outer electrode having a chamber formed therein; an inner electrode, disposed inside the chamber; and a flow guiding structure, disposed inside the inner electrode; wherein the outer electrode and the inner electrode are connected respectively to the two electrode terminals of the power supply; and the flow guiding structure further comprises at least an inlet for introducing a working fluid into the inner electrode and at least an outlet being communicated with the chamber of the outer electrode to guide the working fluid to flow into the chamber of the outer chamber. As the inner electrode can be cooled by the flowing working fluid, not only the wear and tear of the inner electrode can be avoided as its temperature is effective reduced, but also the lifetime of the inner electrode is prolonged and the contamination caused by ion stripping.