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发明名称
摘要
申请公布号
JP4242995(B2)
申请公布日期
2009.03.25
申请号
JP20000064756
申请日期
2000.03.09
申请人
发明人
分类号
H01L21/822;H04L25/02;H01L27/04;H03K19/017
主分类号
H01L21/822
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