发明名称 Method and apparatus for vibration machining with two independent axes
摘要 A vibration machining apparatus and method of use. The vibration machining apparatus includes a cutting tool and a motion stage coupled to one of the cutting tool or the workpiece to move the cutting tool relative to the workpiece. A tangent to a machine path and a normal to the surface of the workpiece define a vibration plane. The vibration machining apparatus further includes a first vibrating unit coupled to one of the cutting tool or the workpiece to vibrate it along a first vibrational direction, substantially in the vibration plane, and a second vibrating unit coupled with one of the cutting tool or the workpiece to vibrate the one of the cutting tool or the workpiece coupled to the second vibrating unit along a second vibrational direction, different from the first direction and substantially in the vibration plane.
申请公布号 US7508116(B2) 申请公布日期 2009.03.24
申请号 US20050221041 申请日期 2005.09.07
申请人 PANASONIC CORPORATION 发明人 LIU XINBING
分类号 H01L41/08 主分类号 H01L41/08
代理机构 代理人
主权项
地址