发明名称 SEMICONDUCTOR DEVICE INCLUDING LINE PATTERNS
摘要 <p>A semiconductor device including line patterns is provided to obtain the desired dummy and operation line patterns by minimizing the interference of light in the isolation area. A semiconductor device comprises a dummy line pattern(115) located on a surface of substrate. The dummy line pattern is parallely arranged on the substrate along the first direction. The dummy line patterns have sub line pattern(110). The sub line pattern is subdivided by an isolation area(112). The isolation areas are arranged between sub line patterns.</p>
申请公布号 KR20090029510(A) 申请公布日期 2009.03.23
申请号 KR20070094822 申请日期 2007.09.18
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 LEE, SUNG BOK;LEE, JOON HEE
分类号 H01L21/027 主分类号 H01L21/027
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