发明名称 Suppression of chemical reactivity on semiconductor surfaces
摘要 The present invention relates generally to compositions, kits and methods of providing improved semiconductor surfaces free of dangling bonds and free of strained bonds. One method provides for preventing interfacial reactions between a semiconductor surface and metal or dielectric comprising the steps of preparing a passivated semiconductor surface using a valence-mending agent and depositing a layer of metal or dielectric on the valence-mended semiconductor surface. As further described, a semiconductor surface free of interfacial reactions between the surface and a second molecular species may include a semiconductor surface with one atomic layer of valence-mending atoms, wherein valence mending occurs after introducing the semiconductor surface to a passivating agent. The present invention also includes a kit for preventing interfacial reactions from occurring on a semiconductor surface comprising a passivating agent and an instructional manual.
申请公布号 US7504155(B2) 申请公布日期 2009.03.17
申请号 US20040822343 申请日期 2004.04.12
申请人 BOARD OF REGENTS, THE UNIVERSITY OF TEXAS SYSTEM 发明人 TAO MENG;KIRK WILEY P.
分类号 B32B9/00;H01L21/04;H01L21/285;H01L29/45;H01L29/47 主分类号 B32B9/00
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