| 摘要 |
[PROBLEMS] To provide a substrate inspecting apparatus by which an inspection time can be shortened by reducing the number of times of short-circuit inspection by performing the short-circuit inspection to a plurality of substrates in parallel. [MEANS FOR SOLVING PROBLEMS] A substrate inspecting apparatus is provided for inspecting electrical characteristics of a plurality of substrates to be inspected. The substrate inspecting apparatus is provided with a plurality of substrate inspecting jigs, which have a plurality of inspecting probes set on wiring patterns of the substrates to be inspected and are arranged corresponding to each of the substrates to be inspected; a control means for setting the inspecting probe of one wiring pattern as a first inspecting section and for setting the inspecting probes for wiring patterns other than the one wiring pattern as second inspecting sections for each of the substrates to be inspected; a switching means for setting a plurality of first inspecting sections as a first group by connecting the first inspecting sections in parallel and for setting a plurality of inspecting sections as a second group by connecting the second inspecting sections in parallel; a power supply means for generating a prescribed potential difference between the first and the second groups; a detecting means for detecting electrical characteristics between the first and the second groups; and a judging means for judging existence of a short-circuit based on the electrical characteristics. |
