| 摘要 |
A method of manufacturing the substrate loading device is provided to form one sidewall member and substrate supports in one body and to reduce the assembly time and assembly cost of side walls. The substrate loading device(100) comprises the upper plate(110), the lower plate(120), and the first lateral wall(130) and the second side wall(140). The substrate-receiving space(180) is formed inside the substrate loading device. To manufacture the substrate loading device, Firstly, a plurality of substrate supports(135) is formed in one sidewall member. Subsequently, the sidewall member is cut and a plurality of side walls is manufactured. The sidewall member and substrate support can be integrately manufactured.
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