FERROELECTRIC CAPACITOR AND METHOD OF MANUFACTURING THE SAME

摘要

A ferroelectric capacitor and a manufacturing method thereof are provided to improve the electrical characteristic such as the polarization or the data integrity. A ferroelectric capacitor comprises a lower substructure(105) formed on a substrate(100); a bottom electrode(135) having the first and second bottom electrode film patterns(125,130) and electrically connected to the lower substructure; a ferroelectric layer pattern(140) having the surface which is treated by the neutral beam and is formed on the bottom electrode; an upper electrode having the first and second upper electrode layer patterns(145,150) and is formed on the surface-treated ferroelectric layer.