| 摘要 |
PROBLEM TO BE SOLVED: To avoid breakdown of a body to be retained by removing static electricity in a retaining unit at once in a jig for retaining which attracts and retains the body to be retained and permit the removal of electricity by quickly conducting the static electricity in the jig for retaining. SOLUTION: The jig for retaining 100 is provided with the retaining unit consisting of ceramics and a part formed so as to be contacted with the retaining unit and lower in a volume resistivity than that of the retaining unit or the jig for retaining 100 is constituted of the retaining member made of ceramics and the supporting member, lower in the volume resistivity than that of the retaining member and contacted with the retaining member, which are jointed through an adhesive equal to or lower than the retaining member in the volume resistivity. COPYRIGHT: (C)2009,JPO&INPIT |
