Variable-reach robotic arm for clean transport of e.g. silicon wafers, optical media or solar cells, employs single drive unit, fixed toothed wheel and series of meshing gears

摘要

The robot arm is driven from a single drive unit using gears. One toothed wheel is fixed in position. It meshes with an odd number of toothed wheels forming a series. The first arm component is driven directly by the drive unit. The second arm component is driven by a odd-numbered wheel, in the sequence starting from the fixed wheel. Between the second arm component and the odd-numbered wheel, a leveling unit is provided for the substrate carrier. This is formed by two wedge-discs in contact, which can be rotated relative to each other.