QUICK CHANGEOVER APPARATUS AND METHODS FOR WAFER HANDLER
摘要
Quick changeover apparatus for wafer handlers (10) capable of handling at least two sizes of wafer frames (14) and methods of using such apparatus are disclosed.
申请公布号
WO2009032612(A1)
申请公布日期
2009.03.12
申请号
WO2008US74277
申请日期
2008.08.26
申请人
TEXAS INSTRUMENTS INCORPORATED;SAGUN, SONNY, MARQUEZ;PENAMORA, RHONEL, MORADA (PH);SERNADILLA, ALAN, SIMON
发明人
SAGUN, SONNY, MARQUEZ;PENAMORA, RHONEL, MORADA (PH);SERNADILLA, ALAN, SIMON
