| 摘要 |
PROBLEM TO BE SOLVED: To extract information on the surface shape of an inspection object and on a fine structure on the surface. SOLUTION: This device comprises an illumination light setting means for setting illumination light having an optical characteristic corresponding to the fine structure to be measured, constituted on the surface of a measuring object; a measuring means for measuring reflected light when irradiating the measuring object with the illumination light; and an extraction means for extracting the information on the surface shape of the measuring object and on the fine structure constituted on the surface from the measured reflected light. COPYRIGHT: (C)2009,JPO&INPIT
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