A METHOD FOR MANUFACTURING A MICRO-MIRROR ARRAY

摘要

A method for manufacturing a micro-mirror array is provided to joint a mirror plate and a driving unit and form the driving unit while the driving unit and the mirror plate are joined, so a crack is not generated on the mirror plate. A micromirror array manufacturing method is comprised of the steps: forming a comb electrode(S10), a forming a mirror plate(S20), bonding a wafer(S30), finishing the comb electrode formation(S40), and separating the mirror plate(S50). The comb electrode is formed by using the multi-step etch height and the comb-electrode for the driving part is formed on the first wafer. The mirror plate is formed on the second wafer, and the first wafer and the second wafer are joined. The comb electrode is formed while first wafer and the second wafer are joined.