GAS DISTRIBUTION APPARATUS AND SUBSTRATE PROCESSING APPARATUS HAVING THE SAME,申请号KR20070081579-传众专利搜索

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发明名称	GAS DISTRIBUTION APPARATUS AND SUBSTRATE PROCESSING APPARATUS HAVING THE SAME
摘要
申请公布号	KR100888185(B1)	申请公布日期	2009.03.10
申请号	KR20070081579	申请日期	2007.08.14
申请人		发明人
分类号	H01L21/02;H01L21/205	主分类号	H01L21/02
代理机构		代理人
主权项
地址

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