发明名称 |
INTEGRATED PASSIVE DEVICES AND METHOD FOR MANUFACTURING THE SAME |
摘要 |
An integrated passive devices and a method for manufacturing the same are provided to minimize the insertion loss on the corresponding action frequency zone. An integrated passive device manufacturing method includes the step of providing a substrate(20); the step of forming an anodized aluminum layer(10) having air bubble of nano-sizes on the top of the substrate; the step of forming an oxide silicon layer(30) by plating the oxidation silicon(Sio2) on the anode aluminum oxide layer; the step of forming one or more thin film passive devices(40,40') on the laminating structure of the oxide silicon layer.
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申请公布号 |
KR20090024846(A) |
申请公布日期 |
2009.03.10 |
申请号 |
KR20070089723 |
申请日期 |
2007.09.05 |
申请人 |
KOREA UNIVERSITY INDUSTRIAL & ACADEMIC COLLABORATION FOUNDATION |
发明人 |
KIM, YOUNG KEUN;JI, HYE MIN;LEE, WON SANG |
分类号 |
H01L27/02;H01L27/00 |
主分类号 |
H01L27/02 |
代理机构 |
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代理人 |
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地址 |
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