发明名称 INTEGRATED PASSIVE DEVICES AND METHOD FOR MANUFACTURING THE SAME
摘要 An integrated passive devices and a method for manufacturing the same are provided to minimize the insertion loss on the corresponding action frequency zone. An integrated passive device manufacturing method includes the step of providing a substrate(20); the step of forming an anodized aluminum layer(10) having air bubble of nano-sizes on the top of the substrate; the step of forming an oxide silicon layer(30) by plating the oxidation silicon(Sio2) on the anode aluminum oxide layer; the step of forming one or more thin film passive devices(40,40') on the laminating structure of the oxide silicon layer.
申请公布号 KR20090024846(A) 申请公布日期 2009.03.10
申请号 KR20070089723 申请日期 2007.09.05
申请人 KOREA UNIVERSITY INDUSTRIAL & ACADEMIC COLLABORATION FOUNDATION 发明人 KIM, YOUNG KEUN;JI, HYE MIN;LEE, WON SANG
分类号 H01L27/02;H01L27/00 主分类号 H01L27/02
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