SUBSTRATE LOADING STAGE AND PLASMA PROCESSING APPARATUS,申请号KR20070028843-传众专利搜索

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发明名称	SUBSTRATE LOADING STAGE AND PLASMA PROCESSING APPARATUS
摘要
申请公布号	KR100887459(B1)	申请公布日期	2009.03.10
申请号	KR20070028843	申请日期	2007.03.23
申请人		发明人
分类号	H01L21/68;H01L21/301;H01L21/31;H01L21/67	主分类号	H01L21/68
代理机构		代理人
主权项
地址

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