发明名称 HUB BLADE
摘要 PROBLEM TO BE SOLVED: To provide a hub blade capable of controlling and lessening the deflection of the blade on cutting. SOLUTION: A hub blade is used in a cutting apparatus having a chuck table holding a workpiece and a cutting mechanism which has a flange holding, in a rotatable way, a hub blade cutting the workpiece held with the chuck table. It has a circular base having a circular hub and a cutting edge electrodeposited to the outer periphery of the circular base. An annular groove is formed in the part of the circular base in which the innermost part of the cutting edge is located, and the innermost part of the cutting edge is engaged in the groove. The annular groove is preferably V- or U-shaped in the cross-section. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009039919(A) 申请公布日期 2009.02.26
申请号 JP20070206059 申请日期 2007.08.08
申请人 DISCO ABRASIVE SYST LTD 发明人 OKANO AYUMI
分类号 B28D1/24;H01L21/301 主分类号 B28D1/24
代理机构 代理人
主权项
地址