| 摘要 |
PROBLEM TO BE SOLVED: To improve operability of a single axis robot at low cost. SOLUTION: Guide rails 14 and 15 extending along a longitudinal direction are arranged in a plurality of rows in a frame 2. A plurality of sliding tables 3 and 4 individually moving along the guide rails 14 and 15 are disposed in a width direction of the frame 2. A stator 5 is arranged in one row in common to a plurality of moving members 6 installed in accordance with the sliding tables 3 and 4. COPYRIGHT: (C)2009,JPO&INPIT |
