发明名称 Method for the optical inspection and visualization of optical measuring values obtained from disk-like objects
摘要 The present invention relates to a method for optically inspecting and visualizing optical measuring values from at least one image of a disk-like object, including the steps of recording said at least one image of said at least one disk-like object, wherein a plurality of optical measuring values are produced from said at least one recorded image; generating a resulting image, wherein an area of the surface of said disk-like object having optical measuring values within a predetermined interval, is associated with a colour or brightness value selected from a predetermined range; and varying at least one imaging parameter as a function of the detected and evaluated optical measuring values and/or as a function of a visual inspection of the resulting image by an operator.
申请公布号 US2009052766(A1) 申请公布日期 2009.02.26
申请号 US20080228582 申请日期 2008.08.14
申请人 VISTEC SEMICONDUCTOR SYSTEMS GMBH 发明人 MICHELSSON DETLEF
分类号 G06K9/00 主分类号 G06K9/00
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