| 摘要 |
A probe card for inspecting semiconductor wafer capable of setting probe pin without bonding material is provided to improve productivity and quality by facilitating individual exchange of a probe pin. A probe card comprises a PCB(110), a supporting member(120), a silicone plate(130), and a probe pin(140). An inspecting circuit is formed on the PCB. The supporting member is installed in a bottom of the PCB. The silicone plate is fixed in the supporting member, and has a plurality of slit holes. The probe pin comprises a body part, an elastic fixing part, an insertion handle part, and a contact part. The body part is coupled in the slit hole. The elastic fixing part is supported in a top of the silicone plate. The insertion handle part is formed in both sides of the body part. The contact part is contacted with a chip pad of a wafer. |
