| 摘要 |
A MEMS inertial delay device having a substrate layer, an intermediate layer and a device layer. A plurality of freely moveable interlocking masses are formed in the device layer along with springs which connect the masses to first and second supports. Movement of a first one of the interlocked masses, due to a shock event, allows subsequent masses to move, with a last mass including an activation member, movement of which causes operation of a mechanism, such as movement of a lock in a safe/arm arrangement in a munition round.
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