STOKER WITH PURGE CONDITION SENSING

摘要

The present invention provides a method, system, and components for protecting substrates and particularly reticles by providing purging and sensing and confirmation of the purge streams. A storage housing with a purge system for reticle pods has an automated robotic mechanism for transferring reticle pods includes a gripper with an air flow sensor therewith. The housing includes receptacles for receiving the reticle pods, the receptacle having purge outlets as part of the purge system that discharge purge streams when the reticle pod is not in place and discharge into the reticle pod when the pod is seated. The air flow sensor on the gripper can confirm and measure a purge stream at a receptacle before placing the reticle pod on the receptacle.