OPTICAL WAVEGUIDE STRUCTURE, ITS MANUFACTURING METHOD, AND OPTICAL MODULE

摘要

PROBLEM TO BE SOLVED: To provide an optical waveguide structure and its manufacturing method capable of being optically coupled to an optical element mounted on a substrate at high efficiency and sealing the optical element by a formation material of the optical waveguide, and to provide an optical module. SOLUTION: The optical waveguide structure 2 includes: a sheet-like clad part 30 formed on the substrate 10 mounting the optical element 20, burying the optical element 20 and formed of a dry film of an optical curing resin or heat curing resin; a core part 40 formed in substantially parallel to the substrate 10 in the clad part 30, positioned at an upper part of the optical element 20 at the end and formed of a dry film of the optical curing resin; and a reflection face 50 formed at an upper part of the optical element 20 and optically coupling the optical element 20 and the core part 40. COPYRIGHT: (C)2009,JPO&INPIT