发明名称 GLASS DRILLING METHOD, OPTICAL WINDOW PREPARING METHOD, ANGLE ADJUSTING METHOD OF OPTICAL WINDOW EDGE SURFACE, GLASS DRILLING DEVICE AND IMAGE SENSOR MODULE
摘要 PROBLEM TO BE SOLVED: To provide an excellent method and device by which a notch is not formed on the peripheral edge of a hole when a fine hole is drilled in glass. SOLUTION: The surface of an object 1 consisting of the glass is covered with a protective layer 4 and an opening 40 for drilling is formed in a portion of a drilling part of the protective layer 4. An eluate 2 capable of eluting the glass is injected from a nozzle 3 and brought into contact with the surface of the object 1 through the opening 40 for drilling and impact is applied by pressure of≥5×10<SP>-2</SP>N/cm<SP>2</SP>and≤20×10<SP>-2</SP>N/cm<SP>2</SP>. The eluate 2 injected from the nozzle 3 is granular having a diameter of≥20μm and≤400μm which is smaller than that of the opening 40. A through hole 10 is formed in the object 1 by continuing the impact by the eluate 2. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009035478(A) 申请公布日期 2009.02.19
申请号 JP20080233111 申请日期 2008.09.11
申请人 TESCOM:KK 发明人 YANAGISAWA SHINTARO
分类号 C03B33/02;C03C15/00;H01L27/14 主分类号 C03B33/02
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