| 摘要 |
PROBLEM TO BE SOLVED: To solve a problem that a defect inspection method of a circuit pattern determines non-defective or defective of a subject from a difference in simple comparison with a model reference pattern to increase a processing speed, and determines differences as fine as possible as a defect because the circuit pattern directly relates to operation of a product, however the fine difference results in excessive detection, and visual re-inspection is required separately. SOLUTION: An image of a defect part of the subject which is determined as the defect in the inspection by the simple comparison is determined whether the suspected defect is a true defect and whether the defect is allowable or not even when it is the true defect by analysis on each type of defects. COPYRIGHT: (C)2009,JPO&INPIT
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