ANGULAR VELOCITY SENSOR AND PROCESS FOR PRODUCING THE SAME

摘要

The present invention provides an angular velocity sensor having a stable characteristic in which a vibration element has a small variation in the driving efficiency even when carbon dioxide gas is generated by the reaction with oxygen gas in a package including therein the vibration element. To realize this, the angular velocity sensor of the present invention provides mixed gas of inert gas and oxygen gas in the package so that the mixed gas in the package has a pressure higher than the atmospheric pressure.