| 摘要 |
<p>Disclosed is a continuous and uninterruptible slurry dispense device that includes: four pressure vessels (10,20,30,4), two of which respectively configure a pair, as a drive unit and a standby unit and in which level sensors (91,92,93,94) are installed in divided areas; a slurry circulating pipe (50) for circulating slurry dispensed by a slurry dispense source (2) to a CMP process (4) and the pressure vessel (10,20,30,40), and having a flow transducer (54,56); four dispense connection pipes (12,22,32,42) for connecting the slurry circulating pipe before the CMP process (4) and the pressure vessels (10,20,30,40) in parallel, and respectively having a dispense open/close valve (13,23,33,43); four filling connection pipes (14,24,34,44) for connecting the slurry circulating pipe (50) after the CMP process (4) and the pressure vessels (10,20,30,40) in parallel, and respectively having a filling open/ close valve (15,25,35,45); a pressurizing pipe (70) for transmitting the pressure to the pressure vessels (10,20,30,40) from a pressurizing source (6); four pressurizing connection pipes (16,26,36,46) for connecting the pressurizing pipe (70) and the pressure vessels (10,20,30,40) in parallel, and respectively having a pressurizing open/close valve (17,27,37,47); and an exhaust connection pipe (80) connected to the pressure vessels (10,20,30,40) to exhaust pressure and having an exhaust open/close valve (19,29,39,49).</p> |
