| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe capable of performing fine control of a behavior near a contact part of the probe, and inspecting a chip having a small capacitance and a high-speed large-capacity signal. SOLUTION: A plurality-of-beam composite type contact is characterized in that a distance between at least one pair of facing horizontal beams among a plurality of horizontal beams is changed along a direction crossing the vertical direction, in a parallel spring type probe using as an operation principle, a link mechanism constituted of a vertical probe extending in the vertical direction and a plurality of horizontal beams extending in the direction crossing the vertical direction, and having a linear or curved shape, each one end of which is connected to a fixed end, and each other end of which is connected to the vertical probe. COPYRIGHT: (C)2009,JPO&INPIT |
