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发明名称
摘要
申请公布号	JP4226597(B2)	申请公布日期	2009.02.18
申请号	JP20050503098	申请日期	2004.03.04
申请人		发明人
分类号	H01L21/31;C23C16/44;C23C16/50;H01F19/08;H01J37/32;H01L21/00;H01L21/3065;H05H1/46	主分类号	H01L21/31
代理机构		代理人
主权项
地址

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