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发明名称
浸没式曝光设备及装置制造方法
摘要
一种浸没式曝光设备包含投射光学系统、第一供应单元、及第二供应单元。投射光学系统配置成将曝照光从原版投射至基底上。第一供应单元藉由供应第一液体而在投射光学系统与基底之间形成的空间中形成第一液体膜。空间包含曝照光的光路径。第二供应单元藉由供应不同于第一液体之第二液体而形成围绕第一液体膜的第二液体膜。
申请公布号
TW200908082
申请公布日期
2009.02.16
申请号
TW097106846
申请日期
2008.02.27
申请人
佳能股份有限公司
发明人
山下敬司
分类号
H01L21/027(2006.01);G03F7/20(2006.01)
主分类号
H01L21/027(2006.01)
代理机构
代理人
林志刚
主权项
地址
日本
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