SIL NEAR-FIELD SYSTEM

摘要

A solid immersion lens near-field system is provided to relax the gap servo and tilt margin by using radial polarization incident beam. A solid immersion lens near-field system comprises a radial polarization beam generator(20) generating radial polarization beam, a solid immersion lens(50), an objective lens(45) for focusing the radial polarization beam on the bottom surface of the solid immersion lens, and a mask(40) for shielding the central part of the incident beam near an optical axis. The radial polarization beam generator includes a light source emitting linear polarization beam of fixed wavelength, and a radial polarizing beam splitter converting the polarization state of the incident linear polarization beam into the radial polarization beam.