POWDER FEEDING APPARATUS AND SUBSTRATE DEPOSITING APPARATUS HAVING THE SAME

摘要

An apparatus for supplying powder and a thin film depositing apparatus having the same are provided to supply the powder of extremely small quantities and a fixed quantity by controlling a rotation degree of a transport unit. An apparatus(400) for supplying powder to a substrate processing apparatus includes the followings: a housing storing the powder inside of the housing; a storing unit(420) having a diameter which is getting smaller gradually to a lower part; a supplying unit(430) connected with the storing unit and formed on the lower of the storing unit; a discharging unit(440) placed on a lower part of the housing and having a predetermined interval from the supplying unit; a conveying unit(450) transferring the power from the supplying unit to the discharging unit.