| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a three-dimensional shape measuring device capable of measuring three-dimensional shape, rapidly and accurately. <P>SOLUTION: This three-dimensional shape measuring device comprises a light-projecting section 20 for projecting an optical pattern whose luminance varies periodically according to a position to some region on a conveyance stage 52, where a measuring object 12 is measured, a first line sensor 36 for imaging an optical pattern irradiated region 14, a second line sensor 38 for imaging an optical pattern non-irradiated region 16, and an image analysis-drive control section 40 for calculating the phase of an optical pattern in a certain pixel included in an image 86 obtained, by removing background information from an image 82 imaged by the first line sensor 36 and an image 84 imaged by the second line sensor 38, based on the luminance values of a pixel in the image 86 and a pixel around it, and calculating the height information on a measuring object 12 based on the calculated phase. The first line sensor 36 and second line sensor 38 are arranged so as to simultaneously image the optical pattern irradiated region 14 and optical pattern non-irradiated region 16, respectively. <P>COPYRIGHT: (C)2009,JPO&INPIT |
