| 摘要 |
PROBLEM TO BE SOLVED: To provide a rocking body device, keeping flatness of a movable part even in driving. SOLUTION: This rocking body device includes a support part, a movable part, a torsion spring for rockably supporting the movable part to the support part to enable torsional vibration around a torsion axis, and a driving means for vibrating the movable part. The movable part is formed of monocrystal silicon, and the crystalline plane of the principal surface of the movable part is (110) face, and the crystal orientation parallel to the principal plane of the movable part and vertical to the torsion axis of the torsion axis is [111] orientation. COPYRIGHT: (C)2009,JPO&INPIT
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