| 摘要 |
PROBLEM TO BE SOLVED: To inhibit pollution of a fluid passage and the like and suitably inhibit dielectric breakdown of a diaphragm caused by electrostatic charging. SOLUTION: In a liquid control valve 10, a diaphragm valve element 26 made of synthetic resin (insulating material) such as fluororesin is connected to a lower end portion of a piston rod 16. The diaphragm valve element 26 has a boss portion 26a connected to the piston rod 16, a peripheral portion 26b caught by a cylinder body 12 and a flow passage body 14, and a diaphragm membrane portion 26c formed between the boss portion 26a and the peripheral portion 26b. A conductive layer 41 is formed on a side of the diaphragm valve element 26 not contacting with liquid over its entire surface. The conductive layer 41 is composed by laminating a high resistance layer of a relatively high resistance and a low resistance layer of a resistance lower than the high resistance layer. COPYRIGHT: (C)2009,JPO&INPIT
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