INTEGRATED CIRCUIT FORMATION USING DIFFERENT ANGLED IMPLANTS

摘要

A method of forming an integrated circuit includes forming a gate structure (110) over a semiconductor body (100), and forming a shadowing structure (112) over the semiconductor body laterally spaced from the gate structure, thereby defining an active area in the semiconductor body therebetween. The method further includes performing an angled implant (120) into the gate structure, wherein the shadowing structure substantially blocks dopant from the angled implant from implanting into the active area, and performing a source/drain implant into the gate structure and the active area.