| 摘要 |
PROBLEM TO BE SOLVED: To provide a water cooling type IC tester capable of safely stopping a water cooling system at a side of a test head when a malfunction occurs on the water cooling system for the test head. SOLUTION: This water cooling type IC tester includes a water supply pipe 41 for cooling water provided to a main frame 4, a water discharge pipe 42, a by-pass pipe 43 coupled between the water supply pipe 41 and the water discharge pipe 42, and a solenoid valve 44 provided to the water supply pipe 41. The water cooling type IC tester further includes a water cooling system malfunction detecting means 45 that closes the solenoid valve 44 when a malfunction occurs on the water cooling system at the side of the test head 5. COPYRIGHT: (C)2009,JPO&INPIT
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