CYLINDRICAL OXIDE ARTICLE AND METHOD OF MANUFACTURING CYLINDRICAL OXIDE TARGET USING THE SAME

摘要

A manufacturing method of a cylinder oxide target is provided to manufacture a target of high density when sintering the cylinder oxide target because a forming density is high and to occur little defect. A manufacturing method of a cylinder oxide target comprises steps of: preparing an oxide slurry in which water, oxide powder and organic additive are included; adding a nitric acid in the oxide slurry and controlling pH of the oxide slurry; injecting the oxide slurry in which the nitric acid is added in the cylindrical mold; rotating the cylindrical mold and forming the oxide slurry into the cylinder oxide molding product; and drying cylinder oxide molding product. The organic additive is an organic polymer including one or more functional groups selected from an operator group consisting of -OH, -COOH, and -NH2 and -NHR.