HYDROGEN SENSOR AND MANYUFACTURING METHOD THEREOF

摘要

A hydrogen sensor and a method of manufacturing the hydrogen sensor are provided to manufacture a catalyst in a plate or needle-like structure of a heat sink to widen the contact area of hydrogen gas and measure a hydrogen gas concentration in a wide range. A hydrogen sensor includes a substrate(1), an oxide film(2) deposited on the substrate, at least one heater formed on the oxide film, an insulating layer(4) formed on the oxide film including the heater, a first reactive part(5) corresponding to a catalytic material layer formed on the insulating layer, and a second reactive part(6a) corresponding to a catalytic material layer formed in at least one of plate and needle-like structures on the first reactive part.