| 摘要 |
PROBLEM TO BE SOLVED: To provide a development device making the variation equal every time, even when a dimensional variation occurs in a development stage, and to provide a method thereof. SOLUTION: This development device 100 of one embodiment of this invention is characterized by including: a turntable 110 for mounting a substrate 200 to be developed thereon; a developer tank 102 supplying a developer 152; a relay tank 104 receiving a certain volume of the developer from the developer tank 102 in every development process of the substrate 200 to store the supplied developer; and a nozzle 108 spraying the developer 154 stored in the relay tank 104 onto the substrate 200. The present invention can make a dimensional variation due to development equal every time. COPYRIGHT: (C)2009,JPO&INPIT |
